| 摘要 |
PURPOSE:To uniformalize quality and performance and lower cost by constituting a frame, springs coupling to this and a movable part supported by the spring with one substrate. CONSTITUTION:A frame 1 and a movable part 2 as well as spring part 31, 32 are constituted by one insulation substrate and their shapes are formed by making use of photolithographic (photoetching) techniques and etching techniques. If a coil pattern 5 is disposed in the magnetic field and current is flowed to the coil pattern 5 through lead wires 61, 62 and a jumper wire 60, the movable part 2 deflects with the spring part 31, 32 as axis, by which the light entering a reflective mirror 4 is deflected. |
