| 摘要 |
PURPOSE:To obtain an optical circuit having transmission performance easily by heating a furnace contg. a material of a refractive index larger than that of a base material in a high vacuum, ionizing the vapor ejecting through the small hole provided in the furnace by means of electron beam irradiation, accelerating the ions and sticking the same on the base material provided with a mask material. CONSTITUTION:A crucible 1 contg. a film forming material 2 such as Pb is heated in a high vacuum with a heater 3 and vapor is ejected through a nozzle provided to the crucible 1 and is supercooled to make clusters which are ionized by the electron beams irradiated from an electron radiation source 4A. Said ions are accelerated by the voltage applied between the crucible 1 (positive electrode) and lead-out electrode 4 (negative electrode), and are stuck to a base material 8 provided with a mask 6, whereby an optical path film 9 is formed. Thereby, the optical circuit having high transmission performance is obtained easily. |
