PROBE, SEMICONDUCTOR INSPECTION APPARATUS, METHOD FOR PRODUCING PROBE, METHOD FOR PRODUCING SEMICONDUCTOR INSPECTION APPARATUS, SEMICONDUCTOR INSPECTION METHOD, AND SEMICONDUCTOR PRODUCTION METHOD

摘要

A probe includes a probe pin having a first end and a second end. The first end is connectable to a semiconductor inspection apparatus such as for electrical testing of semiconductor devices. The second end of the probe pin is for contacting an electrode or terminal of the semiconductor device being inspected. The probe pin has at least a portion between first and second ends that is coated with a magnetic substance layer, which can reduce signal noise during inspection. The probe pin is configured to apply a force for maintaining contact between the second end and the electrode when the probe is placed in contact with the first electrode. The force may be generated, for example, by a flexure design of the probe pin or by incorporation of a coil spring.

主权项

1. A probe, comprising:
a first probe pin having a first end and a second end, the first end being connectable to a semiconductor inspection apparatus and the second end for contacting a first electrode of a semiconductor device, wherein the first probe pin has at least a portion between the first and second ends that is provided with a magnetic substance layer.