| 摘要 |
PURPOSE:To ensure an accurate pattern recognition by a method wherein a pattern to be recognized that is provided with a rugged, uneven surface is subjected to a stripe patterned light and the image signals perceived from the object is converted into binary signals in a frequency sensing unit so that electrodes on a chip is separated from their background. CONSTITUTION:A ceramic substrate 1 provided with a thick film electrode pattern 2, a semiconductor chip 3 or the like is installed on an X-Y stage 5 and is illuminated by a beam emitted by an illuminating system 6 through an optical focusing system 7. The illuminating system 6 consists of a light source 6a, a transparent rotary disk 6b with a plurality of striped pattern original drawings 6c attached thereto, a lens 6d, and a motor 6e. The optical focusing system 7 consists of a half mirror 7a and lenses 7b and 7c. Images obtained by illuminating the substrate 1 with a moir e patterned light is perceived by a TV camera 8 and are supplied to a frequency sensing unit 9 in which the received data are converted into binary signals for exhibition on a display 11 while a controlling unit 10 and an X-Y stage controller 12 effect raster scanning. |
