| 摘要 |
PURPOSE:To increase dielectric strength, to suppress glow discharges, and to miniaturize the entire oscillating device, by providing electric shielding plates at the upper and lower parts of an insulating tube in a high voltage applying part, and improving the electric field distribution at the part of the insulating tube. CONSTITUTION:An upstream gas branching tube 3 and a downstream gas tube 4 are connected to a discharge tube 2 in the gas laser oscillating device 1. Laser medium is supplied to the discharge tube 2 through the insulating tube 6 by a blower 5. The heat generated in the laser medium by said discharge tube 2 is cooled by a heat exchanger 7, and the medium is recirculated. Light resonators constituted by total reflection mirrors and output reflection mirrors are arranged at both end parts of the discharge tube 2. The upper shield 10 is provided in the vicinity of the side of high voltage application and the lower shield 11 is provided in the vicinity of the grounding side, in the insulating tube 6 of said oscillating device 1, so that both shields face each other. The tip part of said shield 10 is bent outward. The distance between both shields is twice the diameter of the insulating tube 6. The inner diameter of the shields 10 and 11 is 1.1-1.5 times the diameter of the tube. Thus the dielectric strength of the insulating tube 6 is improved. |
