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发明名称
METHOD OF FORMING ALUMINUM/COPPER ALLOY CONDUCTORS
摘要
申请公布号
EP0045405(A3)
申请公布日期
1982.09.22
申请号
EP19810105490
申请日期
1981.07.14
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CHIU, GEORGE TEIN-CHU;JOSEPH, ROBERT RODERICK;OZOLS, GUNARS MIERVALDIS
分类号
H01L23/52;H01L21/28;H01L21/3205;H01L21/3213;H01L21/768;(IPC1-7):H05K3/08;H01L21/30;H01L21/26;C23C15/00
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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