| 摘要 |
PURPOSE:To realize a compact differential pressure sensor having a simple structure with high vibration resistance, by varying a magnetic field which acts on a magnetic resistance element fixed within a case a ferromagnetic matter provided to a diaphragm and extracting the differential pressure in the form of the electric signal. CONSTITUTION:A case 5 contains a main body part 5a and a cover body 5b, and these parts are closely adhered to each other with intervention of a plastic or metallic diaphragm 6 between the fringe parts 5a and 5b. A pressure receiving plate 7 made of a ferromagnetic matter of Ni, Co, etc. is provided at both sides of the diaphragm 6. An adjustment spring 9 is set between a side of the plate 7 and an adjustment plate 8 of the part 5a, and a sucking force neutralizing spring 10 is provided between the other side of the plate 7 and the part 5b. Then a resistance element 11 with bias magnet is set opposite to the plate 7, and at the same time an adverse bias magnet is set at both sides of the element 11 with its magnetic pole turned in the direction opposite to the bias magnet. |
