| 摘要 |
PURPOSE:To correct the position of the arrangement pattern of a semiconductor pellet automatically by detecting the inclination of the arrangement pattern from the picture of the pellet and correcting the inclination. CONSTITUTION:An angle correcting mechanism section 11 consists of a torus tabular ring supporter 14 on an X-Y table 10and a pulse motor 15 driving the supporter. An arm 17 is oscillated in the axial direction through the revolution of the pulse motor 15 to turn the ring supporter 14, and the picture in which a semiconductor pellet 1 section is black and a sheet 2 section is white is formed by means of an ITV camera 12. The picture is changed into white or black binary signals, transmitted to an angle correcting driving controlling section 13, and compared with a right picture here and the inclination is detected, signals corresponding to the inclination are transmitted and the pulse motor is turned forward and reversely, and the ring supporter 14 is moved at a right position. |
