| 摘要 |
PURPOSE:To obtain a magnetic head which is exact in its shape and wide in a space between the upper and lower magnetic layers, and to elevate its recording and reproducing efficiency, by forming the lower magnetic layer after providing a recess on a nonmagnetic material. CONSTITUTION:On a substrate 1, a nonmagnetic film 9 is formed, a recess is provided on this film, a lower magnetic layer 2 is patterned, and after that, is covered with a lower insulating layer 3, is polished until the layer 2 is exposed in the back yoke part, a coil 4 is provided on the layer 3, and is covered with an upper insulating layer 5. On this layer, an upper magnetic layer 6 is formed. For instance, when depth of the recess is set to 6mum, a space of the magnetic layer can be widened to 10mum, and also, a step difference in case of forming the upper magnetic layer is only 4mum. The shape of this thin film magnetic head is much more satisfactory in its pattern accuracy than the case of a high step difference of 10mum by a conventional method. |
