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发明名称
Photosensitive single-layer film, process for its production and use of the film
摘要
申请公布号
CH633893(A5)
申请公布日期
1982.12.31
申请号
CH19760005340
申请日期
1976.04.28
申请人
NAPP SYSTEMS, INC.
发明人
ROBERT W. HALLMAN
分类号
G03F7/00;G03F7/004;G03F7/021;G03F7/038;G03F7/04;G03F7/06;G03F7/09;G03F7/11;H01L21/027;H01L21/312;(IPC1-7):G03C1/68;G03C1/76
主分类号
G03F7/00
代理机构
代理人
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地址
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