APPARATUS FOR PREPARATION OF HIGH PURITY SILICON HALIDE,申请号JP19820024590-传众专利搜索

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发明名称	APPARATUS FOR PREPARATION OF HIGH PURITY SILICON HALIDE
摘要
申请公布号	JPS58145612(A)	申请公布日期	1983.08.30
申请号	JP19820024590	申请日期	1982.02.19
申请人	OLYMPUS KOGAKU KOGYO KK	发明人	YUSA ATSUSHI
分类号	C01B33/107;C01B33/08	主分类号	C01B33/107
代理机构		代理人
主权项
地址

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