| 摘要 |
PURPOSE:To simplify constitution with high sensitivity, by providing a window member in the opening of a case, and disposing a pyroelectric film formed with pattern electrodes on the window member side and a full-surface electrode on the other side. CONSTITUTION:An IR sensor is constituted by providing a window member 25 in the opening of a case 19, and disposing a pyroelectric film 22 formed with pattern electrodes 30 on the member 25 side and a full-surface electrode 31 on the other side is disposed in the case 19. The loss in sensitivity is eliminated and the sensitivity is improved markedly by such constitution and since the pyroelectric film has the pattern electrodes on one side alone by vapor deposition or the like, the film is easy to manufacture and the variation in the sensitivity occuring in the variation in capacity are reduced. |
