发明名称 Stacked complementary metal oxide semiconductor inverter.
摘要 <p>An MOS transistor of second conductivity type is provided which is formed in a semiconductor substrate (101) of first conductivity type and includes a first source region (105) of second conductivity type, a first drain region (106) of second conductivity type, and a gate electrode (104) provided on a gate insulation layer (107). Further, an MOS transistor of first conductivity type is provided which is stacked on the MOS transistor of second conductivity type and includes a second source region (114), a second drain region (115) and the gate electrode (104). The first and second source regions are connected to each other through a conductive layer (1091) which is selected from a given metal layer and a given metal silicide layer.</p>
申请公布号 EP0096734(A1) 申请公布日期 1983.12.28
申请号 EP19830103407 申请日期 1983.04.07
申请人 TOKYO SHIBAURA DENKI KABUSHIKI KAISHA 发明人 MIZUTANI, YOSHIHISA
分类号 H01L21/8238;H01L21/28;H01L23/532;H01L27/06;H01L27/08;H01L27/092;H01L29/78;H01L29/786;H03K19/0948;(IPC1-7):01L27/08;01L23/52 主分类号 H01L21/8238
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