| 摘要 |
PURPOSE:To provide a titled device which enables the working with high precision, by the constitution wherein a visible laser beam is irradiated with an optical scanner to the material to be worked to scan the working surface and the temp. drift of the optical scanner is automatically corrected. CONSTITUTION:X-, Y-axis optical scanners 15, 16 are controlled with a scanner driving circuit 20 in accordance with the quotient obtd. by dividing the coordinates of the material 27 to be worked on an X-Y plane 19 inputted from input terminals 151, 152 by the resolution of the scanners 15, 16 in a scan circuit 21. On the other hand, the laser beam 11 made incident with a shutter 13 operated by the input from an input terminal 154 is controlled to scan the material 27 with the scanners 15, 16, a scan lens 17 and a dichroic mirror 18. A visible beam 12 is further made incident to scan the plane 19, and the same is inputted through a photoelectric conversion means 23, a binary encoding circuit 24, and a central coordinate detection circuit 25 to a detection circuit 26 for a correction rate, by which the correction rate is determined and is outputted to the circuit 21. |
