| 摘要 |
PURPOSE:To reduce slackening of a film band and occurring of damages on a processed surface of the film band by transporting the film band by a plurality of guide rolls disposed in such a manner that the film band is curved in one direction to be transported. CONSTITUTION:A continuous type processing device includes a transport roll installation chamber 8 for accomodating a feed roll 1 for feeding out a film band 3 and a take-up roll 2, and processing chambers 4A-4C for performing specified processings for the transferred film band 3, wherein intermediate chambers 9 are interposed between the above respective chambers to prevent gas from flowing into the adjacent chamber. Vacuum exhaust systems 10 are respectively connected to the chambers 4A-4C, 8 and 9, and gas introduction systems 11 for putting gas required for processing the film band 3 are connected to the processing chambers 4A-4C. In order to transport the film band 3 curved in one direction, a plurality of guide rolls 7 are disposed, for example, to be U-shaped. |
