| 摘要 |
PURPOSE:To form easily and inexpensively an alloy film having an arbitrary composition by sputtering with high reproduciblity by placing a jig for easily arranging pure metallic or alloy chips on a target with high reproducibility. CONSTITUTION:Pure metallic or alloy chips 3 are arranged on a target 2 of other pure metal or alloy, and sputtering is carried out to form an alloy film having a prescribed composition. At this time, a jig for arranging the chips 3 is used. The body 1 of the jig has the same shape and size as the target 1, and it has uniformly distributed holes 4 which are larger than the chips 3 at positions corresponding to the positions at which the chips 3 are arranged on the target 2. The jig is placed on the target 2, and the chips 3 are put in the holes 4. Thus, the chips 3 are arranged on the target 2. Sputtering is then carried out to form an alloy film. |
