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发明名称
METHOD OF FORMING HIGHLY ALLOYED AREAS IN MULTILAYER STRUCTURES
摘要
申请公布号
SU1098455(A1)
申请公布日期
1985.02.15
申请号
SU19833530657
申请日期
1983.01.03
申请人
V ELEKTROTEKHNICHESKIJ I IM.V.I.LENINA
发明人
LOKTAEV YU.M.,SU;MARKVICHEVA V.S.,SU;NISNEVICH YA.D.,SU;LOPULENKO V.F.,SU;PISAREVA L.N.,SU
分类号
H01L21/225;(IPC1-7):H01L21/225
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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