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发明名称
MANUFACTURE OF GASEOUS FLUOROSILANE
摘要
申请公布号
JPS6090810(A)
申请公布日期
1985.05.22
申请号
JP19830195155
申请日期
1983.10.20
申请人
MITSUI TOATSU KAGAKU KK
发明人
OKITA YUKIHIRO;MARUYAMA KENSAKU;HARADA ISAO;KOTOU NOBUHIKO
分类号
C01B33/107;C01B33/10
主分类号
C01B33/107
代理机构
代理人
主权项
地址
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