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发明名称
CONVEYOR FOR WAFER
摘要
申请公布号
JPS6094286(A)
申请公布日期
1985.05.27
申请号
JP19830200911
申请日期
1983.10.28
申请人
HITACHI SEISAKUSHO KK
发明人
KANAI NORIO;TSUBONE TSUNEHIKO
分类号
B65G25/06;B25J9/04;B25J18/02;H01L21/67;H01L21/677;H01L21/68
主分类号
B65G25/06
代理机构
代理人
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地址
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