| 摘要 |
PURPOSE:To measure an inclined angle of a beam side and a resolution of a beam, respectively, by making the beam scan so as to cross a member having a circular arc-shaped boundary part, and measuring a beam quantity influenced by the boudary part. CONSTITUTION:A beam from an electron gun 31 is irradiated onto a sample surface 34 through lenses 32, 33, also controlled by X/Y direction deflectors 35/36, and scanned in the X/Y directions on the sample surface 34. Also, a circular arc- shaped knife edge 41 is attached onto a table so that the circular arc has a contact on a tangential line vertical an X axis. A position of the edge 41 is determined by changing a beam scanning position to the Y direction, scanning the beam at a constant speed in the X direction, and deriving a time required for the beam 42 to reach the edge 41. The maximum (minimum) position in the X coordinate from this edge position becomes a part orthogonal to the X axis, and by using this part, a beam shape is detected. |
