发明名称 PROCESSING METHOD OF BOUNDARY USED FOR PATTERN DEFECT INSPECTING DEVICE
摘要 PURPOSE:To obtain unit information even in a boundary portion by storing in parallel patterns from a recording medium with the prescribed time difference in two sets of double frame memories, and obtaining the information by the logic sum of the frame memories of the sets. CONSTITUTION:Video signals converted to a set of frame memories of A, C and a set of frame memories of B, D are sequentially stored as shown in Figs B and C. When the logic sum of the memories A, B is taken, reference information is displayed as a complete pattern even in the boundary as shown in Fig. D. Similarly, the logic sum can be taken as shown in Fig. E for the memories C, D.
申请公布号 JPS60133726(A) 申请公布日期 1985.07.16
申请号 JP19830240833 申请日期 1983.12.22
申请人 NIHON JIDOU SEIGIYO KK 发明人 UCHIYAMA YASUSHI;AWAMURA DAIKICHI
分类号 H01L21/66;G01N21/956;G03F1/84;H01L21/027;H01L21/30 主分类号 H01L21/66
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