| 摘要 |
PURPOSE:To contrive the simplification of working and the improvement of reliability by a method wherein strain gauges are diffusion-formed, and a terminal to lead out output signals and a terminal to receive them are electrically connected to each other by means of a film carrier produced by wiring on a flexible film. CONSTITUTION:Solder or Au bumps 22 are formed at positions in the neighborhood of both ends of strain gauges 6 arranged on the side surface 5 of a sense of contact force sensor 21 with a pressure-sensitive structure 2A formed of single crystal Si. The wiring 23A among the strain gauges 6 is made sufficient by a layer of wiring 23A which does not generate intersections of the wirings. On a film 24 made of a flexible material wuch as polyimide, bumps 25 are provided at positions corresponding to the bumps 22, and a wiring 23B is formed only among the bumps 25 necessitating wiring of the bumps 25, and these wirings 23B are led to the substrate-mounting part 24A of the film 24 of downward extension. Bumps for signal lead-out terminals connected to the wirings 23B are kept formed on the substrate-mounting part 24A thus extended. |
