发明名称 VERFAHREN ZUR HERSTELLUNG VON GOLDFARBENEN TITANNITRID-SCHICHTEN
摘要 To prepare gold-coloured titanium nitride layers by means of plasma coating processes, there is added to the process gas comprised of argon and nitrogen an easily volatile gold compound. To this effect, organophosphine or organoarsine derivatives of gold halides are preferably used.
申请公布号 DE3425468(A1) 申请公布日期 1986.01.23
申请号 DE19843425468 申请日期 1984.07.11
申请人 BATTELLE-INSTITUT E.V. 发明人 STEININGER,HELMUT,DR.;ETZKORN,HEINZ-WERNER,DR.
分类号 C23C14/06;G02F1/11;G04B37/22;(IPC1-7):C23C16/34;C23C14/34 主分类号 C23C14/06
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