| 摘要 |
PURPOSE:To enhance resistances to humidity and printing, and resolution by laminating on a conductive substrate the photoconductive first layer made of amorphous silicon, the second layer made of amorphous silicon and higher in resistance than the first layer, and the third photoconductive layer lower in resistance than the second layer. CONSTITUTION:An a-Si photoconductive layer 3 is provided on a conductive substrate 1, e.g. an aluminum drum, a high resistant layer 4 sufficiently higher in resistance than the layer 3 is provided on the layer 3. The layer 4 is made by introducing O, C, or N to a-Si:H to 20-70at.%, and a photoconductive layer 5 made of a-Si:H layer lower in resistance than the layer 4 and capable of absorbing a light having short wavelengths 400-500nm are laminated on the layer 4. The layer 5 may be raised in resistance by introducing an impurity element, such as O or C, and preventing across flow of charge due to low resistance liable to cause the across flow of charge. |
