| 摘要 |
<p>A gas sensor element of a tin oxide film in a gas sensor using a tin oxide film. In this element, a special relation is established between the numerical values of two or three of the highest intensity I1, second highest intensity I2, third highest intensity I3, fourth highest intensity I4 and fifth highest intensity I5 of diffraction rays, which are obtained when the crystalline orientation and crystallinity of the surface of an object to be gas-detected are determined by carrying out an X-ray diffraction operation using Cuk as a ray source; and a half-value width of the highest intensity of diffraction rays is in a level not lower than a predetermined level.</p> |
