| 主权项 |
1. A microwave emission mechanism for emitting into a chamber a microwave generated by a microwave generation mechanism, in a plasma processing apparatus for performing plasma processing by generating a surface wave plasma in the chamber, the microwave emission mechanism comprising:
a transmission path through which the microwave is transmitted, the transmission path comprising a cylindrical outer conductor and an inner conductor coaxially disposed within the outer conductor; and an antenna section configured to emit into the chamber the microwave transmitted through the transmission path, wherein the antenna section comprises: an antenna having a slot through which the microwave is emitted; and a dielectric member through which the microwave emitted from the antenna is transmitted, a surface wave being formed on a surface of the dielectric member; wherein a closed circuit is operable to form with current flowing in an inner wall of the slot and the dielectric member, wherein the current comprises surface current and displacement current, and wherein, when a wavelength of the microwave is λ0, a length of the closed circuit is configured to equal nλ0±δ, wherein n is a positive integer and δ is a fine-tuning component including 0, wherein the length of the closed circuit is based on a height of the slot, a thickness of the dielectric member, and a lateral distance between the slot and the dielectric member. |
