发明名称 COMPLEMENTARY MOS SEMICONDUCTOR DEVICE
摘要 PURPOSE:To reduce a current amplification factor by forming an epitaxial layer and a well layer on a semiconductor substrate, forming MOSFETs on the layers, and further forming a buried layer between the epitaxial layer and the substrate. CONSTITUTION:An N-type buried layer 22 is formed on a P-type silicon semiconductor substrate 21. Then, a P-well layer 24 is formed deeply in an epitaxial layer 23 to arrive at the substrate 21. Then, P-channel MOSFET is formed at N-channel MOSFET and the layer 23 in the layer 24. At this time the P- channel MOSFET is formed on the layer 22. Accordingly, the layer 22 is disposed between the substrate 21 at the lower portion of the P-channel MOSFET and the layer 23.
申请公布号 JPS61202456(A) 申请公布日期 1986.09.08
申请号 JP19850042726 申请日期 1985.03.06
申请人 OKI ELECTRIC IND CO LTD 发明人 TSUBONE HITOSHI;YAMAGUCHI KAZUO
分类号 H01L27/08;H01L27/092;H01L29/78 主分类号 H01L27/08
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