| 摘要 |
PURPOSE:To utilize a light quantity from a light source on the surface to be emitted without loss by using an optical fiber bundle formed at the incident end in a circular shape and at the emitting end in an arcuate shape. CONSTITUTION:A light diverged from a light source 1 to expose a resist is converged by a condensing optical system 2 to form an ultrafine spot, and incident to an optical fiber bundle 3. The bundle 3 is formed of a fine optical fiber. Its one end is bundled in a circular shape and a luminous flux from the system 2 is incident. The other end is bundled in an arcuate shape to form an arcuate secondary light source. This secondary source emits by a focusing optical system 4 to an article 5 to be illuminated such as an IC manufacturing mask. |
