Positive, radiation-sensitive coating solution

摘要

A positive, radiation-sensitive coating solution is described which as essential constituents comprises a radiation-sensitive compound, for example a 1,2-naphthoquinone diazide or a radiation-sensitive combination of compounds, for example a compound having at least one C-O-C bond which can be cleaved by acid and a compound forming a strong acid upon irradiation, and an organic solvent or solvent mixture which at least predominantly consists of a mono(C1 to C4)alkyl ether of 1,2-propanediol. The solution is less toxic and gives better film levelling than conventional positive-resist solutions.