| 摘要 |
PURPOSE:To enable to perform an automatic cleansing, washing-in-water, and drying, by a method wherein both surfaces of a pattern mask are exposed to a mask cassette for holding, and the mask is housed in a casstte holder so that it moves in all directions in a cleansing device having various types of cleansing functions. CONSTITUTION:A mask cassette 27, holding a mask 26, is housed in a cassette holder 28, and is set in a cleansing position (a psition in a point chain line) in a mask cleansing device. Based on a detection signal from a mask discriminating means 36 attached to the mask cassette 27, holder 28 is caused to move in all directions in the cleansing device to the size of the mask 26. Or, with a washing- in-water nozzle 2 first actuated, the mask 26 is washed in water, and with a washing brush 5 then worked, the whole surface of the mask 26 is cleansed through the movement in all directions of the cassette 28. With a water brush 3 then activated, the mask 26 is washed in water. After pure water is sprinkled over the surface of the mask 26 by means of the washing-in-water nozzle 2, the mask 26, with an air knife opened, is dried to complete a cleansing. |
