| 摘要 |
PURPOSE:To permit the high-precision positioning even with the thermal deformation of a ball screw and the temperature variation of the apparatus by carrying out correction by detecting the shift quantity of the ball screw and the temperature of the apparatus in the positioning apparatus such as an X-Y table. CONSTITUTION:A microcomputer 9 reads-in the transfer instruction value supplied from a position instruction device 1, and also reads-in the shift quantity of a ball screw 12 for a board 10 which is supplied from a noncontact shift detector 2 and the temperature of the apparatus which is supplied from a temperature detector 3 through an A/D converter 8. The microcomputer 9 calculates the position deflection due to the thermal deformation of a movable table 11 on the basis of the signals of the above-described devices, and further obtains the shift quantity at the transfer instruction position, performs correction calculation, and then drives a motor 7 to the corrected transfer instruction value through a motor driving part 6, and shifts the movable table 11. Thus, the movable table can be shifted to the correct position. |
