| 摘要 |
PROBLEM TO BE SOLVED: To provide a component exchanger capable of changing, in a small space, a component arranged in a vacuum chamber, without opening the vacuum chamber to atmosphere.SOLUTION: There is provided a component exchanger 1 which can change a consumable component 5 arranged in a vacuum chamber 2, without opening the vacuum chamber 2 to atmosphere. The component exchanger 1 comprises: an auxiliary vacuum container 3 whose internal pressure is variable; and an operation rod Ro, penetrating through the auxiliary vacuum container 3, which can be coupled to a support member 7 for supporting the consumable component 5 so as to move the support member 7 along one direction. While the consumable component 5 is being taken out of the vacuum chamber 2, it is possible to reduce the dimension, of the operation rod Ro, in a movement direction of the support member 7.SELECTED DRAWING: Figure 1 |
