| 摘要 |
PURPOSE:To increase the reliability in wire bonding and to make it high speeding by providing an uneven part on the pressure face of the fine metallic wire of a capillary tip. CONSTITUTION:A fine metallic wire 5 is fed from a through hole 4 by forming a bonding pad 2 on the surface of the insulating substrate 1 of a hard glass, etc. and by arranging a capillary tip 3 on the upper part thereof. Plural small holes 7 are formed on the concentric circle of the pressure face 6 of the fine metallic wire of the tip 3. The pressure face 6 deforms the fine wire 5 with its squash with the descent of the tip 3 and by this bite the frictional force between the pressure face 6 and fine wire 5 is strengthened. The ultrasonic vibration of the tip 3 therefore forms a clean crystal face contact via the frictional vibration of the pad 2 and fine wire 5. Consequently, the pad 2 and the metallic wire 5 are surely adhered by the local heating and the reliability increase and high speeding in wire bonding are enabled. |
