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发明名称
PELLET POSITIONING APPARATUS
摘要
申请公布号
JPS6237942(A)
申请公布日期
1987.02.18
申请号
JP19850177965
申请日期
1985.08.13
申请人
MATSUSHITA ELECTRONICS CORP
发明人
OKAMOTO KIMIO
分类号
H01L21/68;H01L21/67
主分类号
H01L21/68
代理机构
代理人
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