| 摘要 |
PURPOSE:To improve the accuracy by finishing machined parts on both sides of a magnetic gap, for width control and a negative pressure generating part by an ion etching work by using a metallic mask of a thin metallic film. CONSTITUTION:A magnetic gap 2, and magnetic materials 21, 22 to which a gap depth has been worked are butted and brought to a bonding work, and a track 1, a negative pressure generating part 3 and a positive pressure generating part 4 are worked on the upper face and covered with a metallic thin film 5. Onto this film 5, a photoresist 7 is applied, and thereafter, a track of a narrow high accuracy is placed on a mask pattern for working of the generating part 3 and a mask is formed by means of a photolithography. A metallic mask is formed by using this mask as a pattern and etching the film 5, and thereafter, the generating part 3 is formed by means of an ion etching by using this metallic mask. In the end, a part of a magnetic head provided with the generating parts 3, 4 is obtained by removing the residual part of the metallic mask, it is cross-cut in the orthogonal direction of the gap 2, and a magnetic head provided with a broad side scraped part 6 of the track 1 is obtained by means of etching. |
