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发明名称
LIQUID-PHASE EPITAXIAL GROWTH METHOD FOR THIN SEMICONDUCTOR FILM
摘要
申请公布号
JPS6291490(A)
申请公布日期
1987.04.25
申请号
JP19850232692
申请日期
1985.10.17
申请人
NEC CORP
发明人
ENDO KENJI
分类号
C30B19/00;H01L21/208
主分类号
C30B19/00
代理机构
代理人
主权项
地址
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