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发明名称
HIGH-PRECISION MOVING TABLE DEVICE
摘要
申请公布号
JPS62151783(A)
申请公布日期
1987.07.06
申请号
JP19850291985
申请日期
1985.12.26
申请人
TOSHIBA MACH CO LTD
发明人
IWASE AKIRA
分类号
H01L21/30;G05D3/00;G12B5/00;H01L21/027;H01L21/67;H01L21/68
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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ATTACHMENT MECHANISM
