| 摘要 |
PURPOSE:To adjust the light axes of respective folding mirrors simultaneously by a method wherein a plurality of folding mirrors which fold a laser beam generated in a discharge region to a transmitting mirror side are attached to a single folding mirror holder with a predetermined angle. CONSTITUTION:One 7 of folding mirrors 7 and 8 is provided to face a total reflection mirror 4 with a discharge region between and a laser oscillation is generated between the mirrors 4 and 7. A laser beam which is folded by the folding mirrors 7 and 8 advances along a light axis toward the total reflection mirror 4 side and reaches a transmitting mirror 10 through a transmitting hole 3b of a mirror holder 3 to which the total reflection mirror 4 is attached. The laser beam transmitted by the transmitting mirror 10 is outputted from a transmitting hole 13a of a fixed plate 13 provided near a mirror holder 12. Light axis adjustment mechanisms which facilitate independent adjustment of the respective mirror holders 3 and 12 are provided between the fixed plate 13 and the respective mirror holders 3 and 12 and the light axes of the total reflection mirror 4 and the transmitting mirror 10 can be adjusted independently. |
