| 摘要 |
PURPOSE:To continuously form a film in one vacuum vessel and to stabilize the characteristic of a vertically magnetized film by ionizing and depositing a magnetic material on a flexible substrate in high-frequency-excited plasma, and allowing the surface of the deposited layer to react in reactive high-frequency-excited plasma to form a layer. CONSTITUTION:A flexible substrate 8 of polyester is mounted on a holder 9, and pelletized metallic Co and metallic Cr are respectively charged in boats 6 and 6' and held at a specified position in a bell jar. The air pressure in the bell jar is controlled to 10<-5>Torr, then gaseous argon is introduced, the pressure is kept at 8X10<-4>Torr, and a high-frequency electric field is generated on an electrode 7 to produce glow discharge. Then the boats 6 and 6' are heated by vaporization power sources 10 and 10' to melt and vaporize the Co and Cr, and ion plating is carried out to form a vertically magnetized film on the flexible substrate. The power supply is then stopped, a gaseous mixture of argon and oxygen in 4/1 partial pressure ratio is introduced by controlling a variable feed valve 2, the pressure is kept at 1.2X10<3>Torr, glow discharge is again generated, a negative voltage is impressed on the holder 9, the boat 6 is heated by the vaporization power source to vaporize Co, and ion plating is carried out to form a protective film on the vertically magnetized film. |
