| 摘要 |
PURPOSE:To grasp an error state in detail by providing a means for informing a command given to the next stage, its own status and a status from the next stage, to the pre-stage, in case said command has not been ended normally, on each processing equipment except the first stage and the final stage. CONSTITUTION:In case one of a status of an equipment 1c which has been held in a buffer register 5b, or a status of an equipment 1d which has been held in a buffer register 7b has shown an abnormal end, a processing part 2 of an equipment 1b informs its own status (contents of 4b) at that time point, a command 2b (contents of 3b) which has been outputted to the equipment 1c from the equipment 1b, a status (contents of 5b) of the equipment 1c, a command c21 (contents of 6b) which has been outputted to the equipment 1d from the equipment 1c, and a status (of the equipment 1d) which has been held in the buffer register 7b, to an equipment 1a (as a status alpha to be informed to the pre-stage). A processing part 2a of the equipment 1a can know in which equipment an abnormality has been generated, at the time when what kind of command train is being executed, by the status alpha information contents from the equipment 1b. |
