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发明名称
APPARATUS AND METHOD FOR THERMALLY TREATING A SEMICONDUCTOR SUBSTRATE.
摘要
申请公布号
EP0128159(A4)
申请公布日期
1987.10.12
申请号
EP19830903721
申请日期
1983.10.24
申请人
MOTOROLA, INC.
发明人
GURTLER, RICHARD, W.;LEGGE, RONALD, N.;LESK, ISRAEL, A.
分类号
C30B13/16;C30B13/22;C30B13/24;H01L21/20;(IPC1-7):C30B13/16
主分类号
C30B13/16
代理机构
代理人
主权项
地址
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