发明名称 RECEASING METHOD OF ATTRACTED BODY FROM ELECTROSTATIC ATTRACTING DEVICE
摘要 PURPOSE:To carry out the release of an attracted body in a short time, by applying posi-reversed direct current voltage between electrodes for very little time when direct current voltage for attraction which was applied between the positive and negative paired electrodes is cut down. CONSTITUTION:A sheet 1 having an attracting surface is a plastic semi- conductive sheet which has two layers 2, 3 of an upper side and a lower side. Positive electrodes 4-a and negative electrodes 4-b are connected to the under surface of the sheet 1's lower layer having small surface resistance. The electrode are made in comb structure so as to constitute a condenser between the electrodes. An insulating layer 5 and a both surface bonding film 6 under the electrodes are provided with electrodes connecting holes 7, a conductive sealant 8 is filled inside thereof, and lead wires 9 are embedded therein so that their positive and negative electrodes are respectively connected to an electric power source circuit. At this electric circuit, voltage is applied posi-nega reversely for very little time by a contact and a timer after applied voltage is interrupted. Therefore, charge between electrodes can be quickly eliminated, so that a work piece can be released immediately after the end of works.
申请公布号 JPS62255039(A) 申请公布日期 1987.11.06
申请号 JP19860278023 申请日期 1986.11.21
申请人 KUREHA CHEM IND CO LTD 发明人 TSUCHIYA SHINJI;NAKANO KEISHO
分类号 H01L21/683;B23Q3/15;B43L5/02 主分类号 H01L21/683
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