| 摘要 |
PURPOSE:To automatically inspect even a defect which causes the area variation of an electronic parts like cracking by tracking information regarding the edge of the parts among pieces of image information on the plane shape of the parts and comparing it with edge limit information. CONSTITUTION:The image of the plane shape of the electronic parts 1 to be inspected is picked up 2, A/D-converted, and stored in a memory 3. An edge tracking circuit 4 tracks an edge information line 11 read out of the memory 3 by using a detection operator. At this time, even at the position of the cracking 12 tracking is carried up to the inside along the edge of cracking. A deficit part 13 is the same. Further, edge information 10 on the conforming article limit value of the parts 1 is set in a limiting edge information setting means 5 previously. An edge position inspecting and deciding circuit 6 compares the output of the circuit 4 with the output of a setting means 5 successively. In this case, the information line 11 extends beyond a limit line 10 at the cracking 12 and deficit part 13, so it is decided that the parts 1 is defective. The decision result can be known through a warning circuit and a conveying device 8 is used to perform the automatic inspection while parts 1 are changed one after another.
|
