| 摘要 |
PURPOSE:To materialize extremely highly accurate constant speed and to obtain desirable running precision, by using an air guide so that a stage will travel without contact to a platform. CONSTITUTION:With the compressed air supplied to an air guide 40 a stage 4 is kept without contact to a stage platform 1. A linear motor 5 of of voice coil type is driven to measure the speed or position of a stage 4, so that the linear motor 3 is feedback-controlled by a feedback control circuit. As the voice coil type linear motor 3 produces no partial force in the direction orthogonal to the thrust, the stage 4 moves along on the stage platform 1 with the minimum slide resistance coupled with the action of the air guide 40. |
