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发明名称
APPAREIL DE DECLENCHEMENT D'ARC ET PROCEDE POUR DES SYSTEMES DE REVETEMENT PAR DEPOT EN PHASE VAPEUR A L'ARC ELECTRIQUE
摘要
申请公布号
FR2544953(B1)
申请公布日期
1988.03.04
申请号
FR19840005738
申请日期
1984.04.11
申请人
MULTI ARC VACUUM SYSTEMS INC
发明人
CLARK BERGMAN, GARY E. VERGASON, ROBERT CLARK ET SHANNON BOSAK;VERGASON GARY E;CLARK ROBERT;BOSAK SHANNON
分类号
C23C14/24;C23C14/32;H01J37/32;(IPC1-7):H05H1/48;C23C13/12
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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