Integrated interposer with embedded active devices

摘要

An integrated interposer between a first component and a second component includes a substrate. The substrate may have thermal and/or mechanical properties with values lying between the thermal and/or mechanical properties of the first component and the second component. Active devices are disposed on a first surface of the substrate. A contact layer is coupled to the active devices and configured to couple at least the first component and a third component to the integrated interposer. At least one through via(s) is coupled to the contact layer and extends through the substrate to a second surface of the substrate. An interconnect layer is disposed on the second surface of the substrate and coupled to the at least one through via(s). The interconnect layer is configured to couple the second component to the integrated interposer.

主权项

1. An integrated interposer comprising:
a glass interposer substrate; a plurality of active devices on an isolation layer on a first surface of the glass interposer substrate; a contact layer coupled to the plurality of active devices and configured to couple at least a first active die and a second active die to the integrated interposer; at least one through glass via coupled to the contact layer and extending through the glass interposer substrate to a second surface of the glass interposer substrate, the at least one through glass via being conical in shape and having a wider portion adjacent to the contact layer and a narrower portion adjacent to the second surface of the glass interposer substrate; at least one via concentric to and extending through the at least one through glass via; and an interconnect layer on the second surface of the glass interposer substrate and coupled to the at least one through glass via, the interconnect layer configured to couple a package substrate to the integrated interposer.