Process for producing memory cell having stacked capacitor

摘要

A process for producing a memory cell having a stacked capacitor. As the reduction in device size of memory cells progresses, it becomes difficult to obtain a satisfactorily large capacitance even with a stacked capacitor structure. To enable a larger capacitance to be obtained for the same occupied area, projections and recesses are provided on the surface of a capacitor electrode. It is possible, according to the process, to readily produce projections and recesses for increasing the storage capacitance.