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发明名称
SI3N4 MEMBER
摘要
申请公布号
JPS63147866(A)
申请公布日期
1988.06.20
申请号
JP19860294654
申请日期
1986.12.12
申请人
TOSHIBA CORP
发明人
YONEZAWA TAKESHI;ITSUDO YASUHIRO;INOUE HIROSHI
分类号
C04B35/584;C04B35/58
主分类号
C04B35/584
代理机构
代理人
主权项
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