发明名称 Method and apparatus for marking a pattern on an article with a laser including partial feedback of the laser output for generating the marking beam
摘要 In a method and apparatus for marking a pattern on an article with a laser, a device for producing a mask pattern in accordance with an electro-optical effect is utilized so that any reflection of laser energy off of the mask pattern is avoided. Further, laser energy not utilized for the marking of the pattern is fed back to a stage previous to the mask pattern stage. Accordingly, the energy efficiency of laser usage is increased and parts used therein is not damaged by undesirable reflection of laser beams.
申请公布号 US4758848(A) 申请公布日期 1988.07.19
申请号 US19860934713 申请日期 1986.11.25
申请人 NEC CORPORATION 发明人 NAKANO, MASAKAZU
分类号 G02B27/00;B23K26/00;B23K26/06;B23K26/067;B23K26/08;B41M5/26;G02F1/13;G06K1/12;H01L23/544;(IPC1-7):G02B27/00 主分类号 G02B27/00
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