Apparatus for inspecting the surface of a material

摘要

An apparatus for inspecting the surface of a material having a first inspection section for inspecting the wide surface condition of a material with an analysis, a second inspection section for inspecting specific position's conditions of the surface of the material with finer analysis than that of the first inspection section, and a controller for controlling an inspecting position of the second inspection section to inspect an unusual position after the first inspection section finds the unusual position.